태양전지
PE CVD 설비 설계 및 제작
- LL Chamber
- UL Chamber
- PM & LL & UL Main Frame
- Gas Box
- Cell Tray Tranfers System
- Top Lid Open Frame
- Frame Cover
- Foot Board
- Showerhead Cover
- Service Cart
RIE 설비 설계 및 제작
- Main Frame
- Gas Box
- Sheld Box
- Door Valve
- Utility Box
- Maintenance Jig
PE CVD 설비 설계 및 제작
- PC Frame
- LC Frame
- Gas Box
- Cell Tray Tranfers System
- Elec Box
- Cable Duct
- Solenoid Box
- Terminal Block Box
LP CVD 설비 설계 및 제작
- PC Frame
- Gas Box
- Cell Tray Tranfers System
- Cable Duct
- Top Lid Operation Box
- Terminal Block Box